| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device including a step of monitoring a state of a semiconductor manufacturing device by a monitoring device.SOLUTION: In a step of monitoring a state of a semiconductor manufacturing device by a monitoring device, n pieces of state monitor reference value data corresponding to each of n (1≤n) pieces of times is obtained by the monitoring device from a reference time during first operation time of the semiconductor manufacturing device. Each of n pieces of state monitor reference value data is added with a first tolerable value corresponding to each of n pieces of times, and the monitoring device acquires n pieces of upper limit tolerable value data. From each of n pieces of state monitor reference value data, a second tolerable value corresponding to each of n pieces of times is subtracted, and the monitoring device acquires n pieces of lower limit tolerable value data. Using n pieces of upper limit tolerable value data and n pieces of lower limit tolerable value data, state monitoring during second operation time of the semiconductor manufacturing device is performed by the monitoring device. |
