TRANSFER METHOD AND TRANSFER APPARATUS

摘要

PURPOSE: A transfer method and a transfer apparatus are provided to prevent the interference of an alignment mark by controlling the relative position between a substrate and a support unit. CONSTITUTION: A first alignment mark (AM1) is arranged on a substrate. Four first alignment patterns (AP11-AP14) are formed in the first alignment mark. A second alignment mark (AM21) is transferred to the substrate. The second alignment mark is surrounded by the four first alignment patterns. The position of the second alignment mark and the position of the first alignment mark are detected.