CONTROL DEVICE, LENS DRIVE SYSTEM, AND LASER PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a control device by which degradation in alignment precision of laser beam can be suppressed even in a case where a processing head moves at a high acceleration rate.SOLUTION: A control device includes a processing head command generation part 3A which generates a position command for driving a processing head which irradiates a laser beam oscillated from a laser oscillator to an object to be processed by using a processing program and outputs it to a processing head drive device, an eccentricity command generating part 5 which generates an eccentricity command for decentering the center of laser beam from a nozzle center of a processing nozzle by using a processing program and outputs it to a lens drive device which drives a processing lens that is disposed in the processing head and condenses the laser beam, and a disturbance estimation/compensation part 4A which generates a disturbance compensation command for compensating a disturbance to the lens drive device, which is caused by a dynamic behavior of the processing head, based on an acceleration of the processing head corresponding to a processing program and outputs it to the lens drive device.