| 摘要 |
PROBLEM TO BE SOLVED: To provide a longitudinal batch type processing device with good processing gas utilization efficiency and high productivity.SOLUTION: A longitudinal batch type processing device comprises: a cylindrical outer wall body 2; and a polygonal susceptor 3 inserted inside the outer wall body 2 and supporting plural workpieces opposite to an inside face 2a of the outer wall body 2 on a vertical side face 3a opposed to the inside face 2a of the outer wall body 2. A space between the inside face 2a of the outer wall body 2 and the vertical side face 3a of the susceptor 3 is an annular reaction space 10. The annular reaction space 10 is split into plural zones Z1-Z12 in a circumferential direction of the outer wall body 2. In each of the plural zones Z1-Z12, gas is alternately emitted and exhausted in the circumferential direction of the outer wall body 2. |
