| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device capable of reducing unevenness of the finish thickness of a sheet-like product after being polished, in the polishing device for performing polishing by bringing polishing cloth in an endless belt shape into contact with a surface of a sheet-like substrate while circulating and rotating it and making it travel at a high speed.SOLUTION: A polishing device for polishing the surface of a sheet-like substrate includes: a contact roll and a drive roll arranged away from each other in parallel; a driving device for rotationally driving the drive roll; polishing cloth in an endless belt shape, which is extended to the contact roll and the drive roll and is circulated and rotated; and a back roll arranged oppositely in parallel with the contact roll through the polishing cloth. The sheet-like substrate passes through a clearance formed between the polishing cloth and the back roll, and the polishing device further includes temperature control means for cooling the contact roll. |
