| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor that is improved in reliability as a system for implementation of an angular velocity sensor.SOLUTION: An angular velocity sensor is provided with a dummy electrode 80 that surrounds each of a power supply electrode 76, a GND electrode 77 and an output electrode 78 in a case 70 and is at a position where the dummy electrode does not face a land 93 in an opposite side implementation substrate 92. Thus, an angular velocity sensor improved in reliability as a system electrically connected can be provided. |
