| 摘要 |
PROBLEM TO BE SOLVED: To surely locate a substrate, from which a sheet film is peeled off, at a predetermined transfer position regardless of a holding position of the substrate by a holding means, in a peeling technology by which the sheet film is peeled off from one principal surface of the substrate while the other principal surface of the substrate whose one principal surface is stuck with the sheet film is held by holding means.SOLUTION: Since a peeling processed substrate W having a sheet film peeled therefrom is delivered to a positioning block 500 and the substrate W is centered by the positioning block 500, the eccentricity of the substrate W is eliminated at this stage. Then, the centered substrate W can be surely delivered from the positioning block 500 to a temporary placing stage block 400, and furthermore the centered substrate W is moved to a transfer position by the temporary placing stage block 400 to be aligned with the transfer position. |
