| 摘要 |
PROBLEM TO BE SOLVED: To provide an isolator that uses no expensive materials, with its structure being simple, while can be produced at a low cost by utilizing MEMS technology.SOLUTION: A MEMS isolator that outputs an output signal in response to an input signal has capacitors 6, 7 that respectively electrically insulated and provided at an input side and output side. The respective capacitors 6, 7 comprise movable electrodes 9, 10, while it is so constituted that the strain of the movable electrode 9 of the input side capacitor 6 is transmitted to the movable electrode 10 of the output side capacitor 7. |
