| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas barrier film of high production efficiency, for which adhesion with a plastic base material and a dry coating layer is excellent and inline processing is possible, and a production method thereof.SOLUTION: For a gas barrier film and its production method, in a plasma processing device configuration in which a metal roller electrode that is a high frequency application electrode and a ground electrode are arranged, an inert gas is introduced between the electrodes with pressure equal to or higher than 0.5 Pa and lower than 50 Pa, high-density plasma is generated between the electrodes, plasma processing is performed to a plastic film base material surface, and a sufficient adhesion performance is given between the base material and a gas barrier layer formed of aluminum oxide. |
