METHOD FOR MANUFACTURING ABZO TRANSPARENT CONDUCTIVE OXIDE

摘要

PURPOSE: A method for manufacturing an ABZO transparent conductive layer is provided to improve electrical conductivity by a boron vapor diffusion process. CONSTITUTION: Boron is thermally diffused on a soda lime glass substrate (100). The boron is diffused on the soda lime glass substrate with vapor. An AZO layer (200) is formed by diffusion process. The AZO layer is annealed. A boron silicated glass layer (150) is formed on the soda lime glass substrate. [Reference numerals] (100) Soda lime glass substrate; (150) Form a BGS layer; (AA) Deposit an AZO layer (200); (BB) Annealing: boron diffusion