| 摘要 |
PURPOSE: A hybrid plasma reactor is provided to easily generate and maintain the plasma ignition at a low voltage, and produce high-capacity plasma without an inside damage at a high voltage. CONSTITUTION: The hybrid plasma reactor (10) comprises a reactor body (11), the hybrid plasma source (12), and an AC switching power supply (32). The reactor body comprises a discharge space of plasma, a gas inlet, and a gas outlet. The reactor body comprises an inductive antenna, the dielectric window formed between the discharge space of plasma, and a discontinuous conduction tube earthed in the domain arranged in the inductive antenna. The hybrid plasma source comprises the plasma formed in the discharge space of plasma, the inductive antenna inductively combined, and a primary winding coil which is rolled on a magnetic core and combined with the plasma transformer coupled plasma source. The AC switching power supply supplies the power generated from the plasma to the primary winding coil. |
