| 摘要 |
PURPOSE: A sterilizing process system is provided to perform the sterilization of the entire line of a deionized water or ultra-pure water storage tank using the sterilizing process system. CONSTITUTION: A sterilizing process system comprises the following: a storing tank(100) storing deionized water or ultra-pure water; a piping line(110) formed to supply the deionized water or the ultra-pure water while being connected with the storing tank; a circulation line to circulate the deionized water or the ultra-pure water; and an electrolysis device(120) sterilizing the deionized water or the ultra-pure water while being installed on the circulation line or the piping line. |
