| 摘要 |
<p>The present invention relates to a heat treatment apparatus and a heat treatment method that control temperature distribution during cooling. There is provided a cooling step in which a heated treatment object is cooled using a cooling liquid in mist form, and heat treatment is performed by alternatingly repeating a first step (K1) in which the treatment object is cooled at a first mist density, and a second step (K2) in which the treatment object is cooled at a second mist density that is less dense than the first mist density.</p> |
