CAPTEUR DE PRESSION DYNAMIQUE MEMS, EN PARTICULIER POUR DES APPLICATIONS A LA REALISATION DE MICROPHONES

摘要

The sensor has a rectangular deformable cavity (20) for receiving variations of pressure of ambient atmosphere, where the cavity is formed in a flat layer or a flat substrate. The deformable cavity comprises a movable or deformable wall (25) in a plane of the layer or the substrate. A transmission unit i.e. perforation, transmits the pressure variations to the cavity. A detection unit i.e. capacitive comb (24), detects displacement or deformation of the wall in a plane of the sensor under the effect of pressure variation of the ambient atmosphere. Independent claims are also included for the following: (1) an acoustic energy recuperation device comprising electric energy storage units (2) a method of producing a micro-electromechanical systems (MEMS) and/or nano-electromechanical systems (NEMS) pressure sensor.