| 摘要 |
PURPOSE: A composite cleaning device and a method thereof are provided to efficiently clean contaminants of a workpiece by spraying high temperature and high pressure steam to the workpiece. CONSTITUTION: An induction heating device (30) is arranged downstream of a cleaning fluid supply device and generates high temperature and high pressure steam by heating a cleaning fluid supplied from the cleaning fluid supply device. An injection device (40) is arranged downstream of the induction heating device and sprays the steam supplied from the induction heating device to the surface of a workpiece (2). A plasma surface processing device (80) is arranged downstream of the injection device and processing the cleaned surface of the workpiece by generating plasma gas. [Reference numerals] (36,108) Power supply device |
