发明名称 AUXILIARY SHEET FOR LASER DICING
摘要 An auxiliary sheet for laser dicing, which is not cut fully even in a dicing step using a short-wavelength laser and does not deteriorate workability, is provided. The auxiliary sheet for laser dicing of the present invention is characterized by comprising a substrate formed of a polyolefin film and an adhesive layer provided to one surface of the substrate, wherein total light transmittance is 50% or higher in a wavelength range of 300 to 400 nm and haze is 70% or higher in a wavelength range of 300 to 400 nm.
申请公布号 US2013260140(A1) 申请公布日期 2013.10.03
申请号 US201113991951 申请日期 2011.11.16
申请人 MARUYAMA MITSUNORI;ABE NOBUYUKI;KIMOTO CO., LTD. 发明人 MARUYAMA MITSUNORI;ABE NOBUYUKI
分类号 H01L21/683 主分类号 H01L21/683
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