| 发明名称 |
UNDERLAYER FILM COMPOSITION FOR IMPRINTING, AND METHOD FOR FORMING A PATTERN EMPLOYING SAME |
| 摘要 |
<p>Provided is an underlayer film composition for imprinting, which has excellent adhesion with a base material and reduces failure defects of a resist. The underlayer film composition for imprinting contains a curable main agent and a urea-based crosslinking agent.</p> |
| 申请公布号 |
WO2013145829(A1) |
申请公布日期 |
2013.10.03 |
| 申请号 |
WO2013JP51564 |
申请日期 |
2013.01.25 |
| 申请人 |
FUJIFILM CORPORATION |
发明人 |
HATTORI AKIKO;KITAGAWA HIROTAKA;ENOMOTO YUICHIRO;OOMATSU TADASHI |
| 分类号 |
H01L21/027;B29C59/02;C08K5/21 |
主分类号 |
H01L21/027 |
| 代理机构 |
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