| 摘要 |
<p>An annular member (10) as in a first embodiment of the present invention surrounds the periphery of a substrate to be processed (2). The annular member (10) comprises a ceramic sintered compact or quartz glass, and is provided with an annular body (11) having at least one main surface (S1). The body (11) has a grooved part (G) arranged on the one main surface (S1) and a plurality of protuberances (14) projecting from a bottom surface (B) of the grooved part (G). This film-forming device (1) is provided with the annular member (10) and a reaction chamber (4) arranged within the annular member (10). A metallic film (3) is formed on the substrate to be processed (2) in the reaction chamber (4).</p> |
