| 摘要 |
<p>The present invention addresses the problem of providing an optical waveguide element in which electrical charge accumulated in the substrate is diffused, and DC drift and temperature drift are suppressed. An optical waveguide element having: a substrate having an electro-optical effect; an optical waveguide formed on the substrate; a buffer layer (BF layer) formed on the substrate; and a modulator electrode (signal electrode, ground electrode) for modulating light waves that are propagated through the optical waveguide, the modulator electrode being formed on the buffer layer, the optical waveguide element characterized in that a charge diffusion layer for defusing electric charge generated in the substrate is formed between the substrate and the buffer layer, and the charge diffusion layer is electrically connected to a ground electrode constituting the modulator electrode.</p> |
