发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are disclosed. A semiconductor device includes a contact hole formed over a semiconductor substrate so as to open an active region, a contact plug coupled to the active region in the contact hole and having a height lower than that of the contact hole, and a bit line that is coupled to the contact plug and has the same width as the contact plug. When forming a bit line of a cell region, a barrier metal layer is formed between a bit line contact plug and a bit line conductive layer, such that interfacial resistance is reduced, a thickness of the bit line conductive layer is increased, conductivity is improved, and the height of overall bit line is reduced, resulting in reduction in parasitic capacitance.
申请公布号 US2013256904(A1) 申请公布日期 2013.10.03
申请号 US201213607628 申请日期 2012.09.07
申请人 IM SONG HYEUK;SK HYNIX INC. 发明人 IM SONG HYEUK
分类号 H01L23/48;H01L21/336;H01L21/768 主分类号 H01L23/48
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