| 摘要 |
An ULPA filter is arranged at the upper portion in a casing. Air outside of the casing is supplied to the ULPA filter through a duct. Clean air that has passed through the ULPA filter is led to an opening of a spin plate through a passage forming member, a connection member, a base, a motor supporting member and a rotating shaft of a spin motor. The spin chuck holds a substrate such that the upper surface of the substrate is opposite to the spin plate. In this state, the spin motor operates, causing the spin plate to rotate and thus the lower surface of the rotating substrate to be cleaned by a cleaning brush.
|
