| 摘要 |
A die coater includes: a detecting section which detects a thickness of a coating film formed on a substrate; and a controlling section which can control the quantity of a supply flow of a coating liquid to be supplied to a cavity by a supplying section and the quantity of an ejection flow of the coating liquid to be ejected from the cavity by an ejecting section, on the basis of a detection result of the detecting section, when a coating width in a longitudinal direction of a slot has been changed.
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