SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZONE GAS FEEDS

摘要

Apparatus and methods for sharing a gas panel among a plurality of multi-zone gas feed chambers of a plasma processing chamber. Each multi-zone gas feed chamber is provided with its own multi-zone gas feed device to adjustably split the incoming gas flow into each chamber and provide the different gas flows to different zones of the multi-zone gas feed chamber.