| 摘要 |
A particulate film laminating apparatus (1) is provided with: a nanoparticle generating chamber (2), in which nanoparticles (12) of a metal material (9) are generated; a nanofiber generating chamber (3), in which a nanofiber (13) of a resin material (11) is generated; a laminating chamber (4), in which the nanoparticles (12) and the nanofiber (13) are film formed and laminated on a substrate (18); a nanoparticle film-forming region (15), in which the nanoparticles (12) are film formed in the film-forming chamber (4); a nanofiber film-forming region (16), in which the nanofiber (13) is film formed in the film-forming chamber (4); a moving unit (17), which moves the substrate (18) between the nanoparticle film-forming region (15) and the nanofiber film-forming region (16); an air-releasing unit (5), which releases air from the laminating chamber (4); and a cooling gas introducing unit (8), which introduces a cooling gas into each of the nanoparticle generating chamber (2) and the nanofiber generating chamber (3). |
