发明名称 |
TARGET MATERIAL PURIFICATION APPARATUS AND TARGET SUPPLY APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a target material purification apparatus which stably supplies a target material.SOLUTION: The target material purification apparatus may include: a purifying tank for storing a target material; a heating part for heating the inside of the purifying tank; and an oxygen atom removing part for removing oxygen atoms present in the target material. |
申请公布号 |
JP2013201118(A) |
申请公布日期 |
2013.10.03 |
申请号 |
JP20120250018 |
申请日期 |
2012.11.14 |
申请人 |
GIGAPHOTON INC |
发明人 |
SHIRAISHI YUTAKA;WAKABAYASHI OSAMU |
分类号 |
H05G2/00;G03F7/20;H01L21/027 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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