发明名称 |
METHOD OF DELIVERING A PROCESS GAS FROM A MULTI-COMPONENT SOLUTION |
摘要 |
A method and chemical delivery system are provided. The method includes providing a vapor phase of a multi-component liquid source. The method further includes contacting a pre-loaded carrier gas with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the multi-component liquid source and delivering a gas stream comprising at least one component of the liquid source to a critical process or application, wherein the amount of the component in the carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. The chemical delivery system includes a multi- component liquid source having a vapor phase. The system further includes a pre-loaded carrier gas source that is in fluid contact with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the liquid source and an apparatus for delivering a gas stream including at least one component of the liquid source, wherein the amount of the component in the pre-loaded carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. |
申请公布号 |
WO2013148262(A1) |
申请公布日期 |
2013.10.03 |
申请号 |
WO2013US31519 |
申请日期 |
2013.03.14 |
申请人 |
RASIRC |
发明人 |
ALVAREZ, DANIEL, JR.;SPIEGELMAN, JEFFREY, J.;HOLMES, RUSSELL, J.;HEINLEIN, EDWARD;SHAMSI, ZOHREH |
分类号 |
B01F3/04 |
主分类号 |
B01F3/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|