发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
摘要 A semiconductor device and fabrication method thereof are provided, wherein the fabrication method of the semiconductor device includes the following steps. Forming a semiconductor layer on a substrate, wherein the semiconductor layer has a top surface and a bottom surface that is opposite to the top surface. The bottom surface is in contact with the substrate, and the top surface has a plurality of pits, the pits are extended from the top surface toward the bottom surface. Preparing a solution, wherein the solution includes a plurality of nanoparticles. Filling the nanoparticles into the pits. Forming a conducting layer on the semiconductor layer after filling the nanoparticles into the pits.
申请公布号 US2013256650(A1) 申请公布日期 2013.10.03
申请号 US201213481856 申请日期 2012.05.27
申请人 YANG CHIH-CHUNG;CHEN HORNG-SHYANG;TING SHAO-YING;LIAO CHE-HAO;CHEN CHIH-YEN;HSIEH CHIEH;CHEN HAO-TSUNG;YAO YU-FENG;YEH DONG-MING;NATIONAL TAIWAN UNIVERSITY 发明人 YANG CHIH-CHUNG;CHEN HORNG-SHYANG;TING SHAO-YING;LIAO CHE-HAO;CHEN CHIH-YEN;HSIEH CHIEH;CHEN HAO-TSUNG;YAO YU-FENG;YEH DONG-MING
分类号 H01L33/28;H01L33/26;H01L33/32;H01L33/34 主分类号 H01L33/28
代理机构 代理人
主权项
地址