发明名称 METHOD FOR PRODUCING CHIP HAVING WATER-REPELLENT FRONT SURFACE AND HYDROPHILIC BACK SURFACE
摘要 Provided is a novel method for producing a chip having a water-repellent front surface and a hydrophilic back surface. For this purpose, the production method according to the first embodiment of the disclosure of the present invention includes a step of bringing a front surface (811a) of a chip (811) having a hydroxyl group into contact with an organic solution (905), which is obtained by dissolving R1-Si(OR2)3 or R1-SiY3 in a second hydrophobic solvent (905a), while protecting the back surface (811b) of the chip (811) by means of a water film (902), thereby forming a thin water-repellent film on the front surface (811a) of the chip (811).
申请公布号 WO2013145610(A1) 申请公布日期 2013.10.03
申请号 WO2013JP01701 申请日期 2013.03.14
申请人 PANASONIC CORPORATION 发明人 ARASE, HIDEKAZU;KOMORI, TOMOYUKI
分类号 B32B27/00;H01L21/52 主分类号 B32B27/00
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