| 摘要 |
PROBLEM TO BE SOLVED: To smoothly change a beam without generating electric discharge in an ion beam optical system.SOLUTION: An ion beam device includes an ion source 101 discharging an ion beam 9, a condenser lens electrode 102, a storage section 13 storing a set voltage value of a lens corresponding to an irradiation mode, and a control section 16 which reads out the set voltage value appropriately corresponding to the next previous irradiation mode and sets the voltage value to a lens power source. |
