发明名称 SILICON ON INSULATOR AND THIN FILM TRANSISTOR BANDGAP ENGINEERED SPLIT GATE MEMORY
摘要 Memory cells comprising thin film transistor, stacked arrays, employing bandgap engineered tunneling layers in a junction free, NAND configuration. The cells comprise a channel region in a semiconductor strip formed on an insulating layer; a tunnel dielectric structure disposed above the channel region, the tunnel dielectric structure comprising a multilayer structure including at least one layer having a hole-tunneling barrier height lower than that at the interface with the channel region; a charge storage layer disposed above the tunnel dielectric structure; an insulating layer disposed above the charge storage layer; and a gate electrode disposed above the insulating layer Arrays and methods of operation are described.
申请公布号 US2013258784(A1) 申请公布日期 2013.10.03
申请号 US201313899629 申请日期 2013.05.22
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 LUE HANG-TING;LAI ERH-KUN
分类号 H01L29/66;G11C16/04 主分类号 H01L29/66
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