| 摘要 |
<p>Provided is a temperature sensor, which does not easily generate cracks in a TiAlN thermistor material layer when a film is folded, can be directly formed in a form of film on a film and the like without firing, and has high reliability with high heat resistance. This temperature sensor is provided with: an insulating film (2); a thin film thermistor section (3) formed of a TiAlN thermistor material on the insulating film; and a pair of patterned electrodes (4), which are formed on the insulating film with a pair of facing electrode portions (4a) disposed on the thin film thermistor section, said pair of facing electrode portions facing each other. The pair of facing electrode portions cover the whole surface of the thin film thermistor section, excluding the region between the facing electrode portions.</p> |
