发明名称 METHOD FOR MANUFACTURING PALLADIUM COATED COPPER BONDING WIRE
摘要 PROBLEM TO BE SOLVED: To suppress a coating layer of a palladium coated copper bonding wire from dropping off from its core material and to provide a bonding wire with a surface on which no copper exposure occurs.SOLUTION: A method for manufacturing a palladium coated copper bonding wire manufactured by forming in a plating step a palladium coated layer around a core material 10 whose main component is copper, comprises: a single wire drawing step P2 in which, before the plating step, the core material is single wire drawn; and a heat treatment step P3 for heat treating the core material thus single wire drawn. The heat treatment step is a batch type heat treatment step in nitrogen atmosphere. In the step the core material after being single wire drawn is placed for a prescribed amount in a heating oven 40 and sealed therein, then the heating oven is filled with nitrogen gas and heating inside the heating oven is started.
申请公布号 JP2013201182(A) 申请公布日期 2013.10.03
申请号 JP20120067363 申请日期 2012.03.23
申请人 NIPPON MICROMETAL CORP 发明人 FUKUZAKI KAZUFUMI;IMAZAWA KOICHI
分类号 H01L21/60;C22F1/00;C22F1/02;C22F1/08;C23G1/10;C25D5/34;C25D7/06 主分类号 H01L21/60
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