| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system capable of allowing substrate processing apparatuses connected to different group control systems to mutually refer to and copy device information such as production history and film formation recipe.SOLUTION: A substrate processing system includes: a substrate processing apparatus for storing apparatus information including substrate processing recipe, and an apparatus ID for identifying a substrate processing apparatus; a group control apparatus for storing the apparatus information and the apparatus ID transmitted from a plurality of substrate processing apparatuses, and a group control ID for identifying a group control device; and a file control apparatus connected to a plurality of group control apparatuses, for storing a plurality units of group control information having the group control ID, the apparatus ID, and a group ID for grouping a plurality of substrate processing contents, mapped therein When the apparatus information is changed on the substrate processing apparatus, the apparatus information changed is transmitted to the file management apparatus via the group management apparatus together with the apparatus ID. From the group control information, the file management apparatus extracts an apparatus ID corresponding to the group ID matching to the apparatus ID received. |
