ULTRASONIC TRANSDUCER ELEMENT CHIP, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE

摘要

An ultrasonic transducer element chip includes a substrate, ultrasonic transducer elements and a reinforcing member. The substrate defines openings arranged in an array pattern. The ultrasonic transducer elements are respectively disposed at the openings on a first surface of the substrate. The reinforcing member is fixed on a second surface of the substrate opposite to the first surface of the substrate. The reinforcing member includes linear groove parts formed on a surface of the reinforcing member fixed on the substrate so that internal spaces of the openings and an external space of the substrate are in communication with each other via the linear groove parts. The linear groove parts extend along a plane of the surface of the reinforcing member, and they are arranged at an interval in a first direction smaller than a width of each opening on the second surface of the substrate in the first direction.