发明名称 |
Methods and Systems for Centrifugal Casting of Polymer Polish Pads and Polishing Pads Made by the Methods |
摘要 |
A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer precursor. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer precursor has cured. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and curing sequentially at least two different polymer precursors. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.
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申请公布号 |
US2013260657(A1) |
申请公布日期 |
2013.10.03 |
申请号 |
US201313854856 |
申请日期 |
2013.04.01 |
申请人 |
WEST THOMAS;MCKEEVER PETER;SONG KEVIN;DIETZ DONALD;NGUYEN LONG;RICHARDSON MATT |
发明人 |
WEST THOMAS;MCKEEVER PETER;SONG KEVIN;DIETZ DONALD;NGUYEN LONG;RICHARDSON MATT |
分类号 |
B24B37/24;B24B37/26 |
主分类号 |
B24B37/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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