| 摘要 |
An inspection tool that can acquire large image data at a high speed while suppressing an increase in the size of a circuit, and an image pickup device that is used for the inspection tool, are provided. Image pickup devices that are used for the inspection tool each include: a plurality of photoelectronic devices of a photoelectron output type; a plurality of sample-and-hold circuits, each circuit being connected to corresponding one of the photoelectronic devices; an analog multiplexer connected to the plurality of sample-and-hold circuits; an analog-to-digital converting circuit connected to the analog multiplexer; and a package that stores the photoelectronic devices, the sample-and-hold circuits, the analog multiplexer and the analog-to-digital converting circuit.
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