| 摘要 |
<p>[Problem] To provide: a flow channel member, which has high electrical reliability, and which can suppress generation of electrostatic discharge, even if an electrostatically charged fluid flowed into the flow channel member; and a heat exchanger and a semiconductor manufacturing apparatus, which are provided with the flow channel member. [Solution] A flow channel member (1) has a flow channel (4) in a base body composed of ceramic, said flow channel being provided with a flow-in port and a flow-out port, and the flow channel (4) has, at least at a part thereof, a low-resistance portion having a surface resistance value less than 1×107 ohm/sq. With the flow channel member, even if the fluid supplied to the flow channel (4) has been electrostatically charged during a period of time before being supplied to the flow channel, static electricity can be removed by means of the low-resistance portion, and the electrostatic discharge can be suppressed, and the flow channel member having high electrical reliability can be provided.</p> |
