| 摘要 |
PROBLEM TO BE SOLVED: To provide an extraneous matter detection method with which residual extraneous matter including oil and resin can be accurately detected without affecting the following processes.SOLUTION: An extraneous matter detection method for detecting extraneous matter 20 attaching to the surface 11 of an examination object 10 involves: a supply process in which a sublimation granular material 30 is supplied to the surface 11 of the examination object 10; a removal process following the supply process, in which the granular material 30 is removed from the surface 11 of the examination object 10; a detection process following the removal process, in which a residual area in which the granular material 30 remains attaching to the extraneous matter 20 is detected; and a sublimation process following the detection process, in which the sublimation granular material 30 in the residual area is sublimated. |
