发明名称 MICROCHIP OPTICAL MEASURING DEVICE AND OPTICAL POSITION ADJUSTMENT METHOD FOR SAID DEVICE
摘要 <p>Provided is a microchip optical measuring device that is capable of automatically adjusting, in a highly accurate manner, the position of a microchip relative to the optical axis of a laser. The microchip optical measuring device is provided with: an irradiation detection unit that detects light produced by projecting a laser on a microchip; a position adjustment unit that changes the relative position of the microchip with respect to the irradiation detection unit; and a control unit that outputs, to the position adjustment unit, a signal to move toward a position where an integrated value or average value of the detected intensity of the aforementioned light in a predetermined region becomes large.</p>
申请公布号 WO2013145836(A1) 申请公布日期 2013.10.03
申请号 WO2013JP51800 申请日期 2013.01.28
申请人 SONY CORPORATION 发明人 MURAKI YOSUKE;OTSUKA FUMITAKA
分类号 G01N15/14;G01N21/49;G01N21/64;G01N37/00 主分类号 G01N15/14
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