发明名称 |
APPARATUS AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES |
摘要 |
<p>An apparatus and method for liquid treatment of wafer- shaped articles comprises a process unit comprising a chuck for holding a wafer-shaped article in a predetermined orientation, and a liquid recovery system that receives used process liquid recovered from the process unit. The liquid recovery system supplies process liquid to a dispenser in the process unit. A supply of fresh process liquid supplies fresh process liquid to the liquid recovery system and also supplies fresh process liquid to a dispenser in the process unit while bypassing the liquid recovery system.</p> |
申请公布号 |
WO2013144782(A2) |
申请公布日期 |
2013.10.03 |
申请号 |
WO2013IB52200 |
申请日期 |
2013.03.20 |
申请人 |
LAM RESEARCH AG;LAM RESEARCH CORPORATION |
发明人 |
GANSTER, MICHAEL;ZAGORZ, PHILIPP;GOLLER, ALOIS |
分类号 |
H01L21/306;B05C5/02;B05C21/00;B08B3/10;B08B3/14;H01L21/30 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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