| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater which is excellent in uniformity of a temperature distribution and stability of a clean degree, and can easily comply with at least a change of a crosswise size of a heating object.SOLUTION: This heater 100 includes: a plurality of electric heaters 11 as a heat generation means which are provided in a plurality of heating wall bodies 10L and 10R disposed oppositely at a distance; a plurality of heat radiation members 12 disposed in a shelf pattern at a distance in a vertical direction in an opposite area of the plurality of heating wall bodies 10L and 10R; an accommodation space 14 of a heating object 13 provided between the heat radiation members 12 adjacent vertically; and a holding means 30 which can hold the heating object 13 accommodated inside the accommodation space 14 in substantially a horizontal attitude, and can change a holding range for the heating object 13. The holding means 30 has an expansion and contraction mechanism 40 which can change a gap of a plurality of support bar materials 17L and 17R, and the expansion and contraction mechanism 40 has a moving mechanism 50 for expanding and contracting a gap of a plurality of pillars 15L and 15R, etc. |
