| 摘要 |
PROBLEM TO BE SOLVED: To quickly search a computer-generated image matching an experimental image of convergent beam electron diffraction from a database.SOLUTION: A strain measurement method includes: a step of computing, per disk image, magnitudes of Zernike moments of computer-generated images of convergent beam electron diffraction with respect to a plurality of computation points A1 within a parameter space with the thickness and strain amount of a sample as parameters and storing computation results in a first database; a step of computing magnitudes of Zernike moments of experimental images per disk image; a step of computing matching degrees &sgr; between magnitudes of Zernike moments of the experimental images and those of the computer-generated images per a plurality of disks to generate sets χ of matching degrees; and a step of taking similarity S between the sets χ of matching degrees as an objective function to execute a search based on a simplex method. A search is quickly made because of the similarity S being less multimodal. |
