CRUCIBLE FOR K CELL, K CELL, AND MOLECULAR BEAM EPITAXY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a crucible for a K cell which stably supplies a high intensity silicon molecular beam while preventing impurities to be mixed and achieves long life, and to provide the K cell and a molecular beam epitaxy device.SOLUTION: In a crucible 20 for a K cell, a surface of the crucible made of carbon is coated by tantalum carbide or a surface of the crucible made of tantalum is coated by tantalum carbide. The K cell 100 includes: a cylindrical reflection plate 3 where the crucible 20 is inserted from one end and a base plate is provided at the other end; and a heater 6 attached to the base plate 12 in the reflection plate 3 for heating the inserted crucible 20. The heater independently stands in an internal space of the reflection plate 3 or a part of the heater 6 is supported by a heater support 9 to be disposed in the internal space of the reflection plate 3.