| 摘要 |
A method and device for the detection and monitoring of the contamination of an optical component in a device for laser material processing, which emits a process laser beam through or onto the optical component. A measurement beam emitted by a light source is projected under an angle of incidence onto an optical surface of the optical component. The beam reflected from the outer surface of the protective window under the angle of reflection corresponding to the angle of incidence is conducted through an aperture stop onto a first light-sensitive detector so as to record the intensity of the reflected beam. The intensity of the scattered radiation, scattered diffusely from the optical surface of the component under a scattering angle, is recorded by a second light-sensitive detector. The degree of the contamination of the component is determined from the recorded intensities of the reflected beam and the scattered radiation.
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