| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element, with which it is possible to obtain a large power generation amount, and a manufacturing method of the piezoelectric element.SOLUTION: A piezoelectric element 1 includes a lower electrode layer 5, an upper electrode layer 8, and a piezoelectric function layer 10. The piezoelectric element 1 is used as a power generation element for obtaining electric power from the lower electrode layer 5 and the upper electrode layer 8 through displacement and polarization of a first piezoelectric layer 61 and a second piezoelectric layer 62 by external force or the like. The upper electrode layer 8 opposes the lower electrode layer 5. The piezoelectric function layer 10 includes the first piezoelectric layer 61 formed through deposition of aluminum nitride particles on the lower electrode layer 5, a first intermediate layer 71 formed from a metallic material on the first piezoelectric layer 61, and the second piezoelectric layer 62 formed through deposition of aluminum nitride particles on the first intermediate layer 71 and is arranged between the lower electrode layer 5 and the upper electrode layer 8. |
