发明名称 MICROSCOPE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a microscope device capable of changing the wavelength characteristic of a wavelength selection part according to the wavelength of an illumination light and an observation light.SOLUTION: A scanning microscope 10 which is an example of a microscope device includes: an object lens 36 for irradiating an illumination light emitted from an illumination source 20 on a sample surface 50 and for collecting an observation light emitted from this sample surface 50; and a wavelength selection portion 32 arranged between the illumination source 20 and the object lens 36 and guides the observation light from the object lens 36 to an optical detection portion 43. This wavelength selection portion 32 includes : two light transmittable members 32a, 32b arranged such that planes having a predetermined reflectivity are opposed to each other with a predetermined interval; and at least one of an interval adjustment portion 32g for changing this interval and an angle adjustment portion 32h for allowing the illumination light and the observation light for the light transmittable members 32a, 32b to be changed.
申请公布号 JP2013200330(A) 申请公布日期 2013.10.03
申请号 JP20120066821 申请日期 2012.03.23
申请人 NIKON CORP 发明人 KOYAMA MOTOO
分类号 G02B21/00;G01N21/64 主分类号 G02B21/00
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