发明名称 HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
摘要 According to an embodiment of the present invention, a heat treatment system is provided. The heat treatment system includes a heating unit, a heat treatment condition memory unit, a power change model memory unit, a heat treatment change model memory unit, a heat treatment result reception unit, and an optimal temperature calculation unit. In the heat treatment system, the optimal temperature calculation unit calculates the power of the heating unit at a corresponding temperature based on the model stored in the power change model memory unit and the calculated temperature, and an optimal temperature is a temperature at which a heat treatment result is closest to the targeted heat treatment result within a range in which the calculated power of the heating unit is not saturated.
申请公布号 US2013260039(A1) 申请公布日期 2013.10.03
申请号 US201313852235 申请日期 2013.03.28
申请人 TOKYO ELECTRON LIMITED 发明人 TAKENAGA YUICHI;WANG WENLING
分类号 B05D3/02;B05C9/14 主分类号 B05D3/02
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