ACOUSTIC MICRO IMAGING DEVICE WITH A SCAN WHILE LOADING FEATURE

摘要

A scanning acoustic microscope includes a transducer mounted in a cup below a particular elevation and a coupling fluid source disposed below the particular elevation and which is adapted to introduce coupling fluid into the cup. A controller is operable to control the transducer and the coupling fluid source during testing such that ultrasonic energy can be directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected. The part is disposed at the particular elevation and a second surface of the part is not contacted by coupling fluid during testing.