| 摘要 |
The apparatus has a frequency characteristic measurement unit which measures (SA02) the closed-loop frequency characteristic of a pressure control unit. A reference frequency characteristic memory unit memorizes the closed-loop frequency characteristic used as a reference. A closed-loop frequency characteristic of a pressure control loop is measured in a pressure control process (SA01). The closed-loop frequency characteristic is measured to adjust (SA04) the pressure control parameter so as to correspond to the closed-loop frequency characteristic used as the reference. |
