发明名称 INSPECTING APPARATUS AND INSPECTING METHOD
摘要 PURPOSE: A testing device and a testing method are provided to reduce position errors generated in a test process. CONSTITUTION: A testing device (100) includes a stage (102), a position error correcting member (10), an optical image acquisition unit, a reference image generator, a comparison unit, a first deviation acquisition unit, a second deviation acquisition unit, and a position correcting unit. A blood test specimen having a testing region virtually divided by a plurality of strips is place on the stage. The position error correcting member is arranged on a region different from the region on which the blood testing specimen is placed on the stage and includes patterns virtually divided by the strips. The optical image acquisition unit radiates light to the testing region of the blood testing specimen and the position error correcting member, thereby acquiring optical images thereof. The reference image generator generates reference images corresponding to the optical image acquired by the blood testing specimen and the position error correcting member. The comparison unit compares the optical images of the blood testing specimen and the reference image and determines defects when a difference of the optical images and the reference images is over a predetermined threshold. [Reference numerals] (105) Photo diode array; (106) Sensor circuit; (107) Position circuit; (108) Comparing circuit; (110) Control calculator; (111) Expansion circuit; (112) Reference circuit; (113) Auto loader control circuit; (114) Table control circuit; (116) Flexible disc device; (118) Pattern monitor; (119) Printer; (122) Laser measuring system; (124) First deviation amount acquiring circuit; (125) Second deviation amount acquiring circuit; (126) Position correcting circuit; (127) Map writing circuit; (AA) Θ axis motor; (BB) X axis motor; (CC) Y axis motor
申请公布号 KR20130108120(A) 申请公布日期 2013.10.02
申请号 KR20130025203 申请日期 2013.03.08
申请人 NUFLARE TECHNOLOGY INC. 发明人 INOUE TAKAFUMI;KIKUIRI NOBUTAKA;ISOMURA IKUNAO
分类号 G01N21/956;H01L21/66 主分类号 G01N21/956
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